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SI-H100 为抽气式气体检测仪，通过设备内部的传感器模块远程吸入样气并进行实时测量。可协助预防或管理半导体及其他工业环境中可能发生的窒息、中毒、火灾爆炸、腐蚀等气体相关事故。
SI-H100 是一款通过设备内部传感器卡匣远程实时吸入并检测样气的采样型气体检测器。 适用于半导体及各类工业环境，帮助预防或管理窒息、中毒、火灾、爆炸或腐蚀等气体相关事故。
- 更换传感器时无需校准
- 大尺寸图形 LCD：直观的图标界面（支持多种状态显示）
- 模拟输出：按气体浓度输出 4-20mA / 故障状态 0mA
- 通信功能：MODBUS、TCP Ethernet（标准）/ 支持 PoE、RS-485
- 支持通过网页更新固件
- 支持热解装置（可选）
| Model | SI-H100 |
|---|---|
| Dimensions | 123(H) x 65(W) x 155(D) mm |
| Weight | 2kg |
| Operating Voltage | DC : 24V ±10% PoE : 36V~57V (Typical: 48V) |
| Flow Rate | 500mL/min (MAX 900) |
| Power Consumption | Approximately 5.0W |
| Display | Graphic LCD (160x100), Gas concentration, unit, sensor status, Rear light, Device abnormality |
| Alarm | 90dB at 10cm |
| Relay | 1st stage, 2nd stage alarm, Device malfunction |
| Analog Output | Analog, 4–20mA |
| Digital Communication | RS-485, TCP Ethernet |
| Sampling Distance | Distance from device to sampling point: Max 30m (FEP tube) Distance from device to exhaust point: Max 30m (FEP tube) |
| Tubing Standard | 1/4" Teflon tube |
| Operating Temperature | 0°C ~ 40°C |
| Certification | CE |
| Input Settings | 4 Button & RS485 & Ethernet |
| Device Warranty | 2 years |
| Sensor Warranty | 1 year |
| External Interface | Ethernet, RS-485 |
| Wiring | 4–20mA / DC Power / Relay : Cable 14 AWG |
| ETC | Firmware updates are available via our website (http://www.senko.co.kr) |
| Gas | Sensor | Range | Alarm 1 | Alarm 2 | Resolution |
|---|---|---|---|---|---|
| ASH3 | Electrochemical | 0~400 ppb | 25 ppb | 50 ppb | 0.1 ppb |
| B2H6 | Electrochemical | 0~400 ppb | 50 ppb | 100 ppb | 0.1 ppb |
| BCL3 | Electrochemical | 0~10 ppm | 1 ppm | 2 ppm | 0.1 ppm |
| C8H22N2Si | Electrochemical | 0~6 ppm | 1 ppm | 2 ppm | 0.01 ppm |
| BF3 | Electrochemical | 0~8 ppm | 0.5 ppm | 1 ppm | 0.01 ppm |
| BTBAS | Electrochemical | 0~50 ppm | 12.5 ppm | 50 ppm | 0.1 ppm |
| C2H2 | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| C2H4 | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| C2H6 | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| C4F6 | Electrochemical | 0~400 ppm | 130 ppm | 260 ppm | 0.1 ppm |
| C5F8 | Electrochemical | 0~40 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| C6H12 | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| C8H18 | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| CH2F2 | IR | 0~5000 ppm | 1000 ppm | 2000 ppm | 1 ppm |
| CH3F | Electrochemical | 0~5000 ppm | 1000 ppm | 2000 ppm | 1 ppm |
| CH3OH | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | %LEL |
| CH4 | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| CH4 | IR | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| CL2 | Electrochemical | 0~3 ppm | 0.25 ppm | 0.5 ppm | 0.01 ppm |
| CIF3 | Electrochemical | 0~1 ppm | 0.05 ppm | 0.1 ppm | 0.01 ppm |
| CO | Electrochemical | 0~100 ppm | 15 ppm | 30 ppm | 0.1 ppm |
| COS | Electrochemical | 0~100 ppm | 14 ppm | 28 ppm | 0.1 ppm |
| DCE | Electrochemical | 0~400 ppm | 100 ppm | 200 ppm | 0.1 ppm |
| DCS | Electrochemical | 0~10 ppm | 2.5 ppm | 5 ppm | 0.1 ppm |
| F2 | Electrochemical | 0~3 ppm | 0.25 ppm | 0.5 ppm | 0.01 ppm |
| GEF4 | Electrochemical | 0~8 ppm | 1 ppm | 2 ppm | 0.01 ppm |
| GEH4 | Electrochemical | 0~800 ppb | 100 ppb | 200 ppb | 0.1 ppb |
| H2 (PPM) | Electrochemical | 0~1000 ppm | 250 ppm | 500 ppm | 1 ppm |
| H2 (%LEL) | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| HBr | Electrochemical | 0~6 ppm | 1 ppm | 2 ppm | 0.01 ppm |
| HCDS / Si2Cl6 | Electrochemical | 0~10 ppm | 2 ppm | 4 ppm | 0.1 ppm |
| HCL | Electrochemical | 0~6 ppm | 1 ppm | 2 ppm | 0.01 ppm |
| HF | Electrochemical | 0~6 ppm | 1 ppm | 2 ppm | 0.01 ppm |
| HMDS / H6H19NSi2 | Electrochemical | 0~400 ppm | 130 ppm | 260 ppm | 0.1 ppm |
| NABAL | Electrochemical | 0~50 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| NF3 | Electrochemical | 0~40 ppm | 10 ppm | 20 ppm | 0.1 ppm |
| NH3 | Electrochemical | 0~100 ppm | 12.5 ppm | 25 ppm | 0.1 ppm |
| NO | Electrochemical | 0~50 ppm | 12.5 ppm | 25 ppm | 0.1 ppm |
| O3 | Electrochemical | 0~400 ppb | 50 ppb | 100 ppb | 0.1 ppb |
| PCp-ZR / (nPrCp)Zr | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| PH3 | Electrochemical | 0~1.2 ppm | 0.15 ppm | 0.3 ppm | 0.01 ppm |
| C5H5N | Electrochemical | 0~10 ppm | 1 ppm | 2 ppm | 0.1 ppm |
| RENA, TEA / C6H15N | Electrochemical | 0~10 ppm | 2.5 ppm | 5 ppm | 0.1 ppm |
| SiCl4 | Electrochemical | 0~10 ppm | 2.5 ppm | 5 ppm | 0.1 ppm |
| SiH4 | Electrochemical | 0~15 ppm | 2.5 ppm | 5 ppm | 0.1 ppm |
| DIPAS (LTO520) | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| HCN | Electrochemical | 0~20 ppm | 10 ppm | 15 ppm | 0.1 ppm |
| 3DMAS (TDMAS) | Electrochemical | 0~10 ppm | 2.5 ppm | 5 ppm | 0.1 ppm |
| TDMAT / C8H24N4Ti | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| TEB / (CH3CH2)3B | Electrochemical | 0~50 ppm | 10 ppm | 20 ppm | 0.1 ppm |
| TEOS / SiC8H20O4 | Electrochemical | 0~30 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| Thalassa | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| TiCl4 | Electrochemical | 0~15 ppm | 1.3 ppm | 2.6 ppm | 0.1 ppm |
| TMA (AL(CH3)3) | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| TMB / C3H9BO3 | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| TMS / C3H10OSi | Electrochemical | 0~30 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| WF6 | Electrochemical | 0~6 ppm | 1 ppm | 2 ppm | 0.01 ppm |
| 4MS (Precursor) | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| O2 | Electrochemical | 0~30 %Vol | 19 %Vol | 23 %Vol | 0.1 %Vol |
| H2S | Electrochemical | 0~100 ppm | 25 ppm | 50 ppm | 0.1 ppm |
| SO2 | Electrochemical | 0~8 ppm | 2 ppm | 4 ppm | 0.01 ppm |
| NO2 | Electrochemical | 0~20 ppm | ppm | ppm | 0.1 ppm |
| C3H8 | Catalytic | 0~100 %LEL | 25 %LEL | 50 %LEL | 1 %LEL |
| C3H8 | IR | 0~100 %LEL | 25 %LEL | 50 %LEL | 1 %LEL |
| CO2 | IR | 0~5000 ppm | 800 ppm | 1000 ppm | 1 ppm |
| IPA | Catalytic | 0~100 %LEL | 25 %LEL | 50 %LEL | 1 %LEL |
| C4H8 | Catalytic | 0~100 %LEL | 25 %LEL | 50 %LEL | 1 %LEL |
| D2 | Catalytic | 0~100 %LEL | 25 %LEL | 50 %LEL | 1 %LEL |
| SF6 | NDIR | 0~1000 ppm | 200 ppm | 400 ppm | 1 ppm |
| CF4 | NDIR | 0~2000 ppm | 500 ppm | 1000 ppm | 1 ppm |
| COS | NDIR | 0~50 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| TEOS | NDIR | 0~50 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| CH3F | NDIR | 0~5000 ppm | 1000 ppm | 2000 ppm | 1 ppm |
| NF3 | NDIR | 0~50 ppm | 10 ppm | 20 ppm | 0.1 ppm |
| H2O2 | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| HCHO | Electrochemical | 0~5 ppm | 0.6 ppm | 1 ppm | 0.1 ppm |
| CpHf / C11H23N3Hf | Electrochemical | ||||
| CP-ZR (ZAC) | Electrochemical | ||||
| VOC | PID | 0~2000 ppm | |||
| N2O | IR | 0~1000 ppm |
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