NDIR NF₃

Non-Dispersive Infrared (NDIR) NF₃ Sensor (0–50 ppm)

DESCRIPTION

The NDIR NF₃ sensor cartridge is a highly reliable non-dispersive infrared (NDIR) sensor designed for precise detection of nitrogen trifluoride (NF₃) in semiconductor manufacturing environments. With excellent stability, fast response and recovery time, and a robust operating range, it ensures accurate and consistent gas monitoring. Optimized for integration into SENKO’s SI-H100 series, the sensor provides dependable performance for critical safety and process applications.

KEY SPECIFICATIONS

- Measurement range: 0–50 ppm
- Resolution: 1 ppm
- Response time: T62.5 < 20 sec
- Accuracy: ≤ ±20% of measured value
- Low Detection Limit (LDL): 4 ppm
- Factory Alarms: 10 ppm / 20 ppm
- Operating life: > 24 months
- Operating conditions: 10℃ ~ 40℃, 0–90% RH (non-condensing)
- Excellent selectivity: No cross-sensitivity to IPA, ethanol, or Galden